Application of the triple Langmuir probe to study local plasma parameters in the radiofrequency discharge that is placed in an additional applied magnetostatic field

被引:2
|
作者
Kozhevnikov, Vladimir [1 ]
Melnikov, Andrey [2 ]
Khartov, Sergey [1 ,2 ]
机构
[1] Natl Res Univ, Moscow Aviat Inst, 4 Volokolamskoe Shosse, Moscow 125993, Russia
[2] Moscow Inst Aviat Technol, Res Inst Appl Mech & Electrodynam, 5 Leningradskoye Shosse, Moscow 125080, Russia
关键词
D O I
10.1063/5.0032306
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma parameters is presented. As an example, this paper presents experimental results that were obtained using the proposed method on local plasma parameters in one of the cross sections of the discharge chamber of the RF ion source with an applied magnetostatic field. The influence of the magnetostatic field on the radial distributions of charged particle density and electron temperature is shown.
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页数:7
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