共 9 条
[1]
CROWDER SW, ICL95047 STANF U
[2]
Fair R.B., 1981, IMPURITY DOPING PROC
[3]
FURUKAWA A, 1997, S VLSI, P87
[7]
Ono A, 1995, MATER RES SOC SYMP P, V354, P319
[8]
RODDER M, 1995, TECH DIG IEDM, P415
[9]
SU L, 1996, S VLSI TECHN, P12