Compact optical delay line based on scanning surface micromachined polysilicon mirrors

被引：1
|
作者：
Cornett, KT [1 ]
Heritage, JP [1 ]
Solgaard, O [1 ]
机构：
[1] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA 95616 USA
来源：
2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年
关键词：
D O I：
10.1109/OMEMS.2000.879605
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：15 / 16
页数：2
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