The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

被引：69

作者：

Gans, T. ^{[1
]}

O'Connell, D. ^{[1
]}

Schulz-von der Gathen, V. ^{[2
]}

Waskoenig, J. ^{[1
]}

机构：

[1] Queens Univ Belfast, Ctr Plasma Phys, Belfast BT7 1NN, Antrim, North Ireland

[2] Ruhr Univ Bochum, Ctr Plasma Sci & Technol, D-44780 Bochum, Germany

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2010年 / 19卷 / 03期

基金：

英国工程与自然科学研究理事会;

关键词：

ROTATIONAL STATE POPULATIONS; FUNCTIONAL SEPARATION; COUPLED PLASMA; DISCHARGES; SPECTROSCOPY; IONIZATION; EXCITATION; HELIUM; MODELS; SPACE;

D O I：

10.1088/0963-0252/19/3/034010

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single-and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave-particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.

引用

页数：6

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