Measurements of the Ion-Beam Current Distribution over a Target Surface under a High Bias Potential

被引:6
|
作者
Mamedov, N. V. [1 ,2 ]
Prokhorovich, D. E. [1 ,2 ]
Yurkov, D. I. [1 ,2 ]
Kanshin, I. A. [1 ]
Solodovnikov, A. A. [1 ]
Kolodko, D. V. [2 ,3 ]
Sorokin, I. A. [2 ,3 ]
机构
[1] Dukhov All Russia Res Inst Automat, Moscow 127055, Russia
[2] MEPHI Natl Res Nucl Univ, Moscow 115409, Russia
[3] Russian Acad Sci, Fryazino Branch, Kotelnikov Inst Radio Engn & Elect, Fryazino 141190, Moscow Oblast, Russia
关键词
Compendex;
D O I
10.1134/S0020441218030223
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A technique for direct measurements of the current distribution over the surface of a target that is at a negative bias potential relative to the ground was developed and tested. Measurements were performed using a six-channel meter that transmitted the measured data through a wireless Bluetooth acquisition system. The trace of an ion flow on the target surface was visualized by the method of luminous beams. Examples of the measured current distributions on a target surface depending on the geometric and physical parameters of the ion-optical system of a Penning plasma source are presented.
引用
收藏
页码:530 / 537
页数:8
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