Neural network based surface shape modeling of stressed lap optical polishing

被引:9
作者
Chen, Min-you [1 ]
Feng, Yong-tao [1 ]
Wan, Yong-jian [2 ]
Li, Yang [2 ]
Fan, Bin [2 ]
机构
[1] Chongqing Univ, Sch Elect Engn, State Key Lab Power Transmiss Equipment & Syst Se, Chongqing 400030, Peoples R China
[2] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
关键词
D O I
10.1364/AO.49.001350
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
It is crucially important to establish an accurate model to represent the relationship between the actuator forces and the lap surface changes when polishing a large and highly aspheric optical surface. To facilitate a computer-controlled optical polishing process, a neural network based stressed lap surface shape model was developed. The developed model reflects the dynamic deformation of a stressed lap. The original data from the microdisplacement sensor matrix were used to train the neural network model. The experimental results show that the proposed model can represent the surface shape of the stressed lap accurately and provide an analytical model to be used to polish the stressed lap control system and the active support system for a large mirror. (C) 2010 Optical Society of America
引用
收藏
页码:1350 / 1354
页数:5
相关论文
共 12 条
[1]  
CHEN M, 1998, WORLD C COMP INT IEE, P1088
[2]   Rule-base self-generation and simplification for data-driven fuzzy models [J].
Chen, MY ;
Linkens, DA .
FUZZY SETS AND SYSTEMS, 2004, 142 (02) :243-265
[3]   A. systematic neuro-fuzzy modeling framework with application to material property prediction [J].
Chen, MY ;
Linkens, DA .
IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS PART B-CYBERNETICS, 2001, 31 (05) :781-790
[4]  
Cui Xiangqun, 2005, Acta Optica Sinica, V25, P402
[5]  
FAN B, 2005, J OPT TECHNIQUE, V31, P751
[6]  
LI Y, 1999, J OPTOELECTRON ENG, V26, P9
[7]  
LI Y, 2001, J OPT TECHNOL+, V27, P490
[8]  
LI Y, 2001, ADV OPTICS MANUFACTU
[9]  
SHAN B, 2002, J OPT PRECIS ENG, V10, P318
[10]  
WANG D, 2005, J OPT TECHNIQUE, V31, P373