A simplified method of interferograms matching in the dual-channel phase-shifting interferometry

被引:6
|
作者
Li, Wenjie [1 ]
Zhang, Qinnan [1 ]
Li, Jiaosheng [2 ]
Zhong, Liyun [2 ]
Lu, Xiaoxu [2 ]
Tian, Jindong [1 ]
机构
[1] Shenzhen Univ, Coll Optoelect Engn, Key Lab Optoelect Devices & Syst, Educ Minist & Guangdong Prov, Shenzhen 518060, Peoples R China
[2] South China Normal Univ, Guangdong Prov Key Lab Nanophoton Funct Mat & Dev, Guangzhou 510006, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
Phase-shifting interferometry; Microscopy system; Interferograms matching; Phase retrieval; RETRIEVAL; ALGORITHM; DEMODULATION;
D O I
10.1016/j.optcom.2019.07.055
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The dual-channel phase-shifting interferometry (DC-PSI) has been focused widely in the dynamic measurement field because of its outstanding advantages. The interferograms matching between two channels is a key factor to the high precision phase retrieval. Suffered from the relative poses of different channel cameras in six-degree of freedom (S-DOF), the interferograms matching between two channels, including translation, rotation and scaling, is always a difficult problem in the DC-PSI. Aiming at the only translation mismatching is here considered and the iterations are needed to get the translation parameters in the translation method, a simplified matching method based on the transformation matrix is proposed, minding all kinds of interferograms mismatching. In the proposed method, only one shot to the calibration plate is needed to obtain the adjustment parameters and the interferograms is matched quickly and precisely. Both the simulation and experimental results demonstrate that the proposed method can improve the phase retrieval accuracy and interferograms matching efficiency.
引用
收藏
页码:457 / 462
页数:6
相关论文
共 50 条
  • [41] Phase retrieval from random phase-shifting interferograms using neural network and least squares method
    Yan, Ketao
    Huang, Xinhao
    Yu, Wenjun
    Cao, Yiqing
    Zhou, Wenjing
    Yu, Yingjie
    OPTICS AND LASERS IN ENGINEERING, 2025, 184
  • [42] Phase shifts extraction based on time-domain orthogonal character of phase-shifting interferograms
    Shou, Junwei
    Zhong, Liyun
    Zhou, Yunfei
    Tian, Jindong
    Lu, Xiaoxu
    OPTICS COMMUNICATIONS, 2017, 382 : 444 - 449
  • [43] Methods for removal of spurious reflection effect on phase-shifting interferometry
    Zhong, Xianghong
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2006, 8 (08): : 617 - 624
  • [44] Application of the blind signal separation method for phase-shifting interferometry with random phase shifts
    Zeng, Fa
    Gu, Huarong
    Tan, Qiaofeng
    2013 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS, 2013, 9046
  • [45] Principal component analysis based simultaneous dual-wavelength phase-shifting interferometry
    Zhang, Wangping
    Lu, Xiaoxu
    Luo, Chunshu
    Zhong, Liyun
    Vargas, Javier
    OPTICS COMMUNICATIONS, 2015, 341 : 276 - 283
  • [46] Two-Step Phase-Shifting Algorithm Based on the Quadratic Spatial Filtering of Interferograms
    Han, Xianxin
    Xie, Linna
    Wang, Yi
    Li, Jiaosheng
    Zhong, Liyun
    Lu, Xiaoxu
    IEEE PHOTONICS JOURNAL, 2020, 12 (06):
  • [47] Accurate Phase Shift Extraction for Generalized Phase-Shifting Interferometry
    Xu Xian-Feng
    Cai Lu-Zhong
    Wang Yu-Rong
    Li Dai-Lin
    CHINESE PHYSICS LETTERS, 2010, 27 (02)
  • [48] Improved accuracy phase retrieval in spatial phase-shifting interferometry
    Vannoni, Maurizio
    Melozzi, Mauro
    Barilli, Marco
    Sordini, Andrea
    Molesini, Giuseppe
    OPTICS COMMUNICATIONS, 2012, 285 (05) : 517 - 520
  • [49] Suppressing phase errors from vibration in phase-shifting interferometry
    Deck, Leslie L.
    APPLIED OPTICS, 2009, 48 (20) : 3948 - 3960
  • [50] Rapid phase shifts extraction and phase retrieval by performing 1-norm operation for phase-shifting interferograms
    Zhou, Yunfei
    Shou, Junwei
    Zhong, Liyun
    Li, Jiaosheng
    Liu, Shengde
    Tian, Jindong
    Lu, Xiaoxu
    JOURNAL OF OPTICS, 2017, 19 (01)