A simplified method of interferograms matching in the dual-channel phase-shifting interferometry

被引:6
|
作者
Li, Wenjie [1 ]
Zhang, Qinnan [1 ]
Li, Jiaosheng [2 ]
Zhong, Liyun [2 ]
Lu, Xiaoxu [2 ]
Tian, Jindong [1 ]
机构
[1] Shenzhen Univ, Coll Optoelect Engn, Key Lab Optoelect Devices & Syst, Educ Minist & Guangdong Prov, Shenzhen 518060, Peoples R China
[2] South China Normal Univ, Guangdong Prov Key Lab Nanophoton Funct Mat & Dev, Guangzhou 510006, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
Phase-shifting interferometry; Microscopy system; Interferograms matching; Phase retrieval; RETRIEVAL; ALGORITHM; DEMODULATION;
D O I
10.1016/j.optcom.2019.07.055
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The dual-channel phase-shifting interferometry (DC-PSI) has been focused widely in the dynamic measurement field because of its outstanding advantages. The interferograms matching between two channels is a key factor to the high precision phase retrieval. Suffered from the relative poses of different channel cameras in six-degree of freedom (S-DOF), the interferograms matching between two channels, including translation, rotation and scaling, is always a difficult problem in the DC-PSI. Aiming at the only translation mismatching is here considered and the iterations are needed to get the translation parameters in the translation method, a simplified matching method based on the transformation matrix is proposed, minding all kinds of interferograms mismatching. In the proposed method, only one shot to the calibration plate is needed to obtain the adjustment parameters and the interferograms is matched quickly and precisely. Both the simulation and experimental results demonstrate that the proposed method can improve the phase retrieval accuracy and interferograms matching efficiency.
引用
收藏
页码:457 / 462
页数:6
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