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机构:
Chinese Acad Sci, Inst Microelect, Lab Nanofabricat & Novel Device Integrat, Beijing 100029, Peoples R China
Southeast Univ, Minist Educ, MEMS, Key Lab,SEU FEI Nanopico Ctr, Nanjing 210096, Peoples R China Chinese Acad Sci, Inst Microelect, Lab Nanofabricat & Novel Device Integrat, Beijing 100029, Peoples R China