Effect of Negative Bias of HiPIMS and AIP Hybrid Depositon on Microstructure, Mechanical and Anti-Corrosive Properties of Cr2N/TiN Multilayer Coatings

被引：4

作者：

Tu, Rong ^{[1
,2
,3
]}

Yuan, Yang ^{[1
]}

Yang, Mai ^{[1
]}

Min, Rui ^{[1
]}

Jiao, Jiao ^{[1
]}

Li, Qizhong ^{[1
,4
]}

Yang, Meijun ^{[1
]}

Ji, Baifeng ^{[5
]}

Zhang, Song ^{[1
]}

机构：

[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, 122 Luoshi Rd, Wuhan 430070, Peoples R China

[2] Chem & Chem Engn Guangdong Lab, Chaozhou Branch, Chaozhou 521000, Peoples R China

[3] Wuhan Univ Technol, Adv Engn Technol Res Inst Zhongshan City, Xiangxing Rd 6, Zhongshan 528400, Peoples R China

[4] Wuhan Univ Technol, Hubei Key Lab Adv Technol Automot Components, Wuhan 430070, Peoples R China

[5] Wuhan Univ Technol, Hubei Key Lab Roadway Bridge & Struct Engn, 122 Luoshi Rd, Wuhan 430070, Peoples R China

来源：

COATINGS | 2022年 / 12卷 / 06期

基金：

中国国家自然科学基金; 对外科技合作项目（国际科技项目）;

关键词：

Cr2N; TiN multilayer coatings; HiPIMS; AIP hybrid deposition; bias; hardness; corrosion resistance; CORROSION-RESISTANCE; NANOCOMPOSITE; WEAR; SEAWATER; BEHAVIOR; VOLTAGE; ALLOY; TIN; CR;

D O I：

10.3390/coatings12060845

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Multi-layered nitride coatings have been widely applied to improve the mechanical and anti-corrosive of metals and/or alloys. Cr2N/TiN multilayer coatings were prepared by the combination of high-power pulsed magnetron sputtering (HiPIMS) and arc ion plating (AIP). The Cr2N layer was co-deposited by HiPIMS and AIP, while the TiN layer was deposited by a single HiPIMS. With increasing the negative bias voltage (V-s) on substrate up to -100 V, the number and size of the droplets decreased; the average grain size of the coatings decreased from 9.4 to 7.5 nm and the hardness increased from 21.5 to 25.1 GPa, and the level of the adhesion of the coatings has reached HF1. The coatings obtained at V-s = -100 V present the best corrosion resistance in NaCl aqueous solution based on the anodic polarization curves and EIS spectroscopy.

引用

页数：18

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