Synthesis of Pyrolytic Carbon Films on Dielectric Substrates

We demonstrate pyrolytic carbon (PyC) synthesis on silica and sapphire substrates using chemical vapor deposition (CVD). The developed technique enables synthesis of an ultrathin carbon film on an arbitrary substrate capable to sustain heating up to 1000 degrees C in methane-hydrogen atmosphere. In this Chapter, we briefly introduce the synthesis and optical properties of the PyC films with thickness as low as 10 nm, demonstrate experimental results obtained and films grown on different substrates may possess essentially different morphological properties.