Laser fabrication of functional micro-supercapacitors

被引:0
作者
Wang, Ying [1 ]
Zhao, Yang [1 ]
Qu, Liangti [1 ,2 ]
机构
[1] Minist Educ China, Key Lab Photoelect Electrophoton Convers Mat, Key Lab Cluster Sci, Sch Chem & Chem Engn,Beijing Inst Technol, Beijing 100081, Peoples R China
[2] Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China
来源
JOURNAL OF ENERGY CHEMISTRY | 2021年 / 59卷
基金
北京市自然科学基金; 国家重点研发计划;
关键词
Laser technology; Micromachining; Energy storage; Micro-supercapacitor; Integration; ALL-SOLID-STATE; REDUCED GRAPHENE OXIDE; HIGH-ENERGY DENSITY; HIGH-PERFORMANCE; POROUS GRAPHENE; VOLUMETRIC CAPACITANCE; CONDUCTING POLYMER; CARBON NANOSHEETS; GRAPHITE OXIDE; PLANAR MICROSUPERCAPACITORS;
D O I
10.1016/j.jechem.2020.12.0022095-4956/
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Due to the rapid development of portable, wearable and implantable electronics in the fields of mobile communications, biomonitoring, and aerospace or defense, there is an increasing demand for miniaturized and lightweight energy storage devices. Micro-supercapacitors (MSCs) possessing long lifetime, high power density, environment friendliness and safety, have attracted great attention recently. Since the performance of the MSCs is mainly related to the structure of the active electrode, there is a great need to explore the efficient fabricating strategies to deterministically coordinate the structure and functionality of microdevices. Considering that laser technology possesses many superior features of facility, high-precision, low-cost, high-efficiency, shape-adaptability and maneuverability, herein we summarize the development of laser technologies in MSCs manufacturing, along with their strengths and weaknesses. The current achievements and challenges are also highlighted and discussed, aiming to provide a valuable reference for the rational design and manufacture of MSCs in the future. (c) 2020 Science Press and Dalian Institute of Chemical Physics, Chinese Academy of Sciences. Published by ELSEVIER B.V. and Science Press. All rights reserved.
引用
收藏
页码:642 / 665
页数:24
相关论文
共 234 条
[1]   DIODES FORMED BY LASER DRILLING AND DIFFUSION [J].
ANTHONY, TR .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) :9154-9164
[2]  
Apollonov V. V., 1985, Soviet Journal of Quantum Electronics, V15, P1, DOI 10.1070/QE1985v015n01ABEH005831
[3]   The mechanism of direct laser writing of graphene features into graphene oxide films involves photoreduction and thermally assisted structural rearrangement [J].
Arul, Rakesh ;
Oosterbeek, Reece N. ;
Robertson, John ;
Xu, Guangyuan ;
Jin, Jianyong ;
Simpson, M. Cather .
CARBON, 2016, 99 :423-431
[4]   Femtosecond laser-based technology for fast development of micromechanical devices [J].
Bähnisch, R ;
Gross, W ;
Staud, J ;
Menschig, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) :31-34
[5]  
Bärsch N, 2003, APPL PHYS A-MATER, V77, P237, DOI [10.1007/s00339-003-2118-4, 10.1107/s00339-003-2118-4]
[6]   CO2 Laser Direct Written MOF-Based Metal-Decorated and Heteroatom-Doped Porous Graphene for Flexible All-Solid-State Microsupercapacitor with Extremely High Cycling Stability [J].
Basu, Aniruddha ;
Roy, Kingshuk ;
Sharma, Neha ;
Nandi, Shyamapada ;
Vaidhyanathan, Ramanathan ;
Rane, Sunit ;
Rode, Chandrashekhar ;
Ogale, Satishchandra .
ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (46) :31841-31848
[7]   Micro-Supercapacitors Based on Interdigital Electrodes of Reduced Graphene Oxide and Carbon Nanotube Composites with Ultrahigh Power Handling Performance [J].
Beidaghi, Majid ;
Wang, Chunlei .
ADVANCED FUNCTIONAL MATERIALS, 2012, 22 (21) :4501-4510
[8]   Recycled Red Mud-Decorated Porous 3D Graphene for High-Energy Flexible Micro-Supercapacitor [J].
Bhattacharya, Gourav ;
Fishlock, Sam J. ;
Pritam, Anurag ;
Sinha Roy, Susanta ;
McLaughlin, James A. .
ADVANCED SUSTAINABLE SYSTEMS, 2020, 4 (04)
[9]   From dead leaves to high energy density supercapacitors [J].
Biswal, Mandakini ;
Banerjee, Abhik ;
Deo, Meenal ;
Ogale, Satishchandra .
ENERGY & ENVIRONMENTAL SCIENCE, 2013, 6 (04) :1249-1259
[10]   Flexible Array of Microsupercapacitor for Additive Energy Storage Performance Over a Large Area [J].
Boruah, Buddha Deka ;
Maji, Arnab ;
Misra, Abha .
ACS APPLIED MATERIALS & INTERFACES, 2018, 10 (18) :15864-15872