Effect of High-κ Dielectric Layer on 1/f Noise Behavior in Graphene Field-Effect Transistors

被引:13
作者
Wang, Yifei [1 ,2 ]
Ho, Vinh X. [1 ,2 ]
Henschel, Zachary N. [1 ,2 ]
Cooney, Michael P. [3 ]
Vinh, Nguyen Q. [1 ,2 ]
机构
[1] Virginia Tech, Dept Phys, Blacksburg, VA 24061 USA
[2] Virginia Tech, Ctr Soft Matter & Biol Phys, Blacksburg, VA 24061 USA
[3] NASA, Langley Res Ctr, Hampton, VA 23681 USA
关键词
graphene; field-effect transistor; flicker noise; 1/f noise; high-kappa dielectric thin film; atomic layer deposition; SPATIAL CHARGE INHOMOGENEITY; ELECTRONIC TRANSPORT; SCATTERING; MODEL;
D O I
10.1021/acsanm.1c00154
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the 1/f noise characteristics at low frequency in graphene field-effect transistors that utilized a high-kappa dielectric tantalum oxide encapsulated layer (a few nanometer thick) placed by atomic layer deposition on Si3N4. A low noise level of similar to 2.2 x 10(-10) Hz(-1) has been obtained at f = 10 Hz. The origin and physical mechanism of the noise can be interpreted by the McWhorter context, where fluctuations in the carrier number contribute dominantly to the low-frequency noise. Optimizing fabrication processes reduced the number of charged impurities in the graphene field-effect transistors. The study has provided insights into the underlying physical mechanisms of the noise at low frequency for reducing the noise in graphene-based devices.
引用
收藏
页码:3647 / 3653
页数:7
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