A Two-Terminal Write-Once-Read-Many-Times-Memory Device Based on an Aluminum Nitride Thin Film Containing Al Nanocrystals

被引:8
作者
Liu, Y. [1 ]
Chen, T. P. [2 ]
Ding, L. [2 ]
Li, Y. B. [3 ]
Zhang, S. [4 ]
Fung, S. [5 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Sichuan, Peoples R China
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[3] Harbin Inst Technol, Sch Astronaut, Ctr Composite Mat, Harbin 150080, Peoples R China
[4] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
[5] Univ Hong Kong, Dept Phys, Hong Kong, Hong Kong, Peoples R China
基金
新加坡国家研究基金会;
关键词
WORM; Memory; Nanocrystal; POST-BREAKDOWN CONDUCTION; CHALCOGENIDE GLASSES; SIO2-FILMS;
D O I
10.1166/jnn.2010.2440
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A switching from a high-conduction state to a low-conduction state occurs in an AlN thin film containing Al nanocrystals (nc-Al) when the nc-Al is charged with electrons. The switching is explained in terms of breaking of the conductive percolation paths of the nc-Al as a result of the charging of the nc-Al. A write-once-read many times-memory (WORM) device is demonstrated based on this phenomenon. The device can be switched by charging the nc-Al with a voltage of +10 V for 100 ms, yielding a current ratio of the two memory states of more than 300 at the reading voltage of 1 V. The charged state (i.e., the low-conduction state) remains unchanged after more than 1 x 10(6) read cycles, and its retention time is predicted to be more than 10 years.
引用
收藏
页码:5796 / 5799
页数:4
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