We demonstrate high-quality epitaxial growth of Heusler alloy Co2FeSi on Ge(111) by molecular beam epitaxy (MBE) at 200 degrees C. Even for growth at such a low temperature, L2(1)-ordered crystal structure is formed and highly uniform magnetic environments around the Fe sites are realized, by transmission electron diffraction and conversion electron Mossbauer spectroscopy, respectively. We also find that the magnetic moment reaches 5.37 mu B/f.u., which is the highest value in thin-film Co2FeSi samples reported. (C) 2010 American Institute of Physics. [doi:1 0.1063/1.3350915]