A REVIEW OF SCHEDULING THEORY AND METHODS FOR SEMICONDUCTOR MANUFACTURING CLUSTER TOOLS

被引：105

作者：

Lee, Tae-Eog ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Ind & Syst Engn, Yusung Gu, Deajeon, South Korea

来源：

2008 WINTER SIMULATION CONFERENCE, VOLS 1-5 | 2008年

关键词：

D O I：

10.1109/WSC.2008.4736310

中图分类号：

TP31 [计算机软件];

学科分类号：

081202 ; 0835 ;

摘要：

Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication processes. We review tool architectures, operational issues, and scheduling requirements. We then explain recent progress in tool science and engineering for scheduling and control of cluster tools.

引用

页码：2127 / 2135

页数：9

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