Dielectric function of nanocrystalline silicon with few nanometers (<3 nm) grain size

被引：64

作者：

Losurdo, M

Giangregorio, MM

Capezzuto, P

Bruno, G

Cerqueira, MF

Alves, E

Stepikhova, M

机构：

[1] CNR, IMIP, I-70126 Bari, Italy

[2] Univ Minho, Dept Fis, P-4710057 Braga, Portugal

[3] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 603600, Russia

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 18期

关键词：

D O I：

10.1063/1.1569052

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The dielectric function of nanocrystalline silicon (nc-Si) with crystallite size in the range of 1 to 3 nm has been determined by spectroscopic ellipsometry in the range of 1.5 to 5.5 eV. A Tauc-Lorentz parameterization is used to model the nc-Si optical properties. The nc-Si dielectric function can be used to analyze nondestructively nc-Si thin films where nanocrystallites cannot be detected by x-ray diffraction and Raman spectroscopy. (C) 2003 American Institute of Physics.

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页码：2993 / 2995

页数：3

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