Growth of diamond films on spherical surfaces by hot filament CVD

被引:15
|
作者
Lunn, B [1 ]
Wright, DA [1 ]
Zhang, LY [1 ]
机构
[1] Univ Hull, Dept Engn Design & Manufacture, Hull HU6 7RX, N Humberside, England
关键词
diamond; coating; spheres; HFCVD;
D O I
10.1016/S0925-9635(97)00205-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A growth system has been designed and built for depositing diamond films onto spherical surfaces; the initial experiments have been carried out using 1.5 cm tungsten carbide (6% Co) balls, as substrates. The films are deposited by hot filament chemical vapour deposition (HFCVD), using an hydrogen/methane mixture as the source. The ball is heated (typically to 925 degrees C) by tantalum filaments, which also provide the source of atomic hydrogen. Provision is made to support and rotate the ball simultaneously either continuously, or in a programmed manner. It has proved possible to coat balls uniformly and reproducibly with good quality diamond coatings, typically 3 mu m thick. Raman measurements confirm that the coatings are indeed diamond, but with some graphite incorporation. The soft impressor method, first presented at ICNDST 5 (1996), has been used to investigate the mechanical properties of the coating system. Results obtained, using both single loading and fatigue measurements, indicate that the films do protect the balls and failure of the system occurs as the result of substrate failure. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:129 / 132
页数:4
相关论文
共 50 条
  • [41] Growth Rate and Electrochemical Properties of Boron-Doped Diamond Films Prepared by Hot-Filament Chemical Vapor Deposition Methods
    Nagasaka, Hiroshi
    Teranishi, Yoshikazu
    Kondo, Yuriko
    Miyamoto, Takeshi
    Shimizu, Tetsuhide
    E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2016, 14 : 53 - 58
  • [42] THE EFFECT OF THE CHANGE IN FILAMENT CHARACTERISTICS ON DIAMOND GROWTH IN HOT FILAMENT CHEMICAL VAPOR-DEPOSITION
    KWEON, DW
    LEE, JY
    MATERIALS RESEARCH BULLETIN, 1992, 27 (06) : 783 - 791
  • [43] Stress distribution in diamond films grown on cemented WC-Co dental burs using modified hot-filament CVD
    Sein, H
    Ahmed, W
    Jackson, M
    Ali, N
    Gracio, J
    SURFACE & COATINGS TECHNOLOGY, 2003, 163 : 196 - 202
  • [44] Plasma Enhanced Hot Filament CVD Growth of Thick Carbon Nanowall Layers
    Natali, Marco
    Passeri, Daniele
    Rossi, Marco
    Dikonimos, Theodoros
    Lisi, Nicola
    NANOINNOVATION 2016, 2017, 1873
  • [45] Lonsdaleite diamond growth on reconstructed Si (100) by hot-filament chemical vapor deposition (HFCVD)
    Van Chiem, C
    Seo, HK
    Ansari, SG
    Kim, GS
    Seo, JM
    Shin, HS
    KOREAN JOURNAL OF CHEMICAL ENGINEERING, 2003, 20 (06) : 1154 - 1157
  • [46] Lonsdaleite diamond growth on reconstructed Si (100) by hot-filament chemical vapor deposition (HFCVD)
    Chu Van Chiem
    Hyung-Kee Seo
    Shafeeque G. Ansari
    Gil-Sung Kim
    Jae Myung Seo
    Hyung-Shik Shin
    Korean Journal of Chemical Engineering, 2003, 20 : 1154 - 1157
  • [47] THE INFLUENCE OF ORIENTED GROWTH ON THE SURFACE-ROUGHNESS OF CVD DIAMOND FILMS
    NORGARD, C
    ESKILDSEN, SS
    MATTHEWS, A
    SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3) : 358 - 361
  • [48] Thermal conductivity of nanocrystalline diamond films grown by hot filament chemical vapor deposition
    Mohr, Markus
    Bruehne, Kai
    Fecht, Hans-Joerg
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (10): : 2590 - 2593
  • [49] TL characterization of CVD diamond films deposited at different growth parameters
    Mitura-Nowak, Marzena
    Karczmarska, Agnieszka
    Marczewska, Barbara
    Marszalek, Marta
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2013, 210 (10): : 2083 - 2087
  • [50] Low resistivity p+ diamond (100) films fabricated by hot-filament chemical vapor deposition
    Ohmagari, S.
    Srimongkon, K.
    Yamada, H.
    Umezawa, H.
    Tsubouchi, N.
    Chayahara, A.
    Shikata, S.
    Mokuno, Y.
    DIAMOND AND RELATED MATERIALS, 2015, 58 : 110 - 114