Growth of diamond films on spherical surfaces by hot filament CVD

被引:15
|
作者
Lunn, B [1 ]
Wright, DA [1 ]
Zhang, LY [1 ]
机构
[1] Univ Hull, Dept Engn Design & Manufacture, Hull HU6 7RX, N Humberside, England
关键词
diamond; coating; spheres; HFCVD;
D O I
10.1016/S0925-9635(97)00205-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A growth system has been designed and built for depositing diamond films onto spherical surfaces; the initial experiments have been carried out using 1.5 cm tungsten carbide (6% Co) balls, as substrates. The films are deposited by hot filament chemical vapour deposition (HFCVD), using an hydrogen/methane mixture as the source. The ball is heated (typically to 925 degrees C) by tantalum filaments, which also provide the source of atomic hydrogen. Provision is made to support and rotate the ball simultaneously either continuously, or in a programmed manner. It has proved possible to coat balls uniformly and reproducibly with good quality diamond coatings, typically 3 mu m thick. Raman measurements confirm that the coatings are indeed diamond, but with some graphite incorporation. The soft impressor method, first presented at ICNDST 5 (1996), has been used to investigate the mechanical properties of the coating system. Results obtained, using both single loading and fatigue measurements, indicate that the films do protect the balls and failure of the system occurs as the result of substrate failure. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:129 / 132
页数:4
相关论文
共 50 条
  • [21] Raman Studies of Nano- and Ultra-nanocrystalline Diamond Films Grown by Hot-Filament CVD
    Klauser, Frederik
    Steinmueller-Nethl, Doris
    Kaindl, Reinhard
    Bertel, Erminald
    Memmel, Norbert
    CHEMICAL VAPOR DEPOSITION, 2010, 16 (4-6) : 127 - 135
  • [22] Growth of diamond thin films on SiCN underlayers by hot filament chemical vapor deposition
    Katamune, Yuki
    Mori, Hiroto
    Izumi, Akira
    THIN SOLID FILMS, 2017, 635 : 53 - 57
  • [23] Nanocrystalline diamond pn-structure grown by hot-filament CVD
    Zimmermann, T
    Janischowsky, K
    Denisenko, A
    Guillén, FJH
    Kubovic, M
    Gruen, DM
    Kohn, E
    DIAMOND AND RELATED MATERIALS, 2006, 15 (2-3) : 203 - 206
  • [24] GAS-PHASE PROCESSES IN DIAMOND SYNTHESIS BY HOT-FILAMENT CVD
    GENCHI, Y
    YASUDA, T
    KOMIYAMA, H
    KAGAKU KOGAKU RONBUNSHU, 1990, 16 (03) : 454 - 462
  • [25] Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls
    Ohmagari, Shinya
    FUNCTIONAL DIAMOND, 2023, 3 (01):
  • [26] Diamond coating on Si3N4 by hot filament and microwave plasma assisted CVD
    Tallaire, A
    Oliveira, FJ
    Fernandes, AJS
    Costa, FM
    Belmonte, M
    Silva, RF
    BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 2004, 43 (02): : 473 - 476
  • [27] Effect of coupling of radio-frequency plasma on the growth of diamond films in a hot filament reactor
    Pai, MP
    Musale, DV
    Kshirsagar, ST
    Mitra, A
    Sainkar, SR
    THIN SOLID FILMS, 1998, 322 (1-2) : 167 - 176
  • [28] High rate of diamond deposition through graphite etching in a hot filament CVD reactor
    Shin, SD
    Hwang, NM
    Kim, DY
    DIAMOND AND RELATED MATERIALS, 2002, 11 (07) : 1337 - 1343
  • [29] Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process
    Jeon, ID
    Park, CJ
    Kim, DY
    Hwang, NM
    JOURNAL OF CRYSTAL GROWTH, 2001, 223 (1-2) : 6 - 14
  • [30] The large-sized diamond single-crystal synthesis by hot filament CVD
    Yamazaki, Ko
    Furuichi, Kazuyuki
    Tsumura, Iori
    Takagi, Yoshiki
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (05) : 1019 - 1022