Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators

被引：1

作者：

Mere, Viphretuo ^{[1
]}

Tiwari, Sudhanshu ^{[1
]}

Dash, Aneesh ^{[1
]}

Kallega, Rakshitha ^{[1
]}

Naik, Akshay ^{[1
]}

Pratap, Rudra ^{[1
]}

Selvaraja, Shankar Kumar ^{[1
]}

机构：

[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bangalore, Karnataka, India

来源：

2020 IEEE SENSORS | 2020年

关键词：

MEMS; waveguide; sensor; silicon photonics; grating; bonding; PZT;

D O I：

10.1109/sensors47125.2020.9278816

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the first demonstration of a promising technology that enables integration of a PiezoMEMS device and on-chip optical read-out. We demonstrate sensor integration by bonding a PZT-based microbeam on a silicon photonics-based resonance interrogator. We report on-chip measurement of three resonance modes of PiezoMEMS beam. We find excellent agreement between on-chip photonics and conventional LDV measurement. We also demonstrate measurement in a vacuum with one-order improvement in the quality factor of the fundamental resonance mode

引用

页数：4

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