Difference in nature of photoinduced defects and structural instability between surroundings of Si-H and Si-H2 bonds in a-Si:H

被引:0
|
作者
Oheda, Hidetoshi [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
来源
关键词
amorphous silicon; structural instability; infrared absorption;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The difference in structural instability between Surroundings of the Si-H and Si-H-2 bonds is studied by observing modulated IR absorption. The result is discussed in connection with the difference in nature of defects depending on their creation temperature.
引用
收藏
页码:129 / 130
页数:2
相关论文
共 50 条
  • [1] Density of Si-H bonds responsible for structural flexibility in a-Si:H
    Oheda, H
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 227 : 120 - 123
  • [2] ROLE OF SI-H AND SI-H2 IN THE PHOTOLUMINESCENCE OF POROUS SI
    LAVINE, JM
    SAWAN, SP
    SHIEH, YT
    BELLEZZA, AJ
    APPLIED PHYSICS LETTERS, 1993, 62 (10) : 1099 - 1101
  • [3] Structural instability depending on a structural configuration at the surroundings of the Si:H bond in a-Si:H
    Oheda, H
    PHYSICS OF SEMICONDUCTORS, PTS A AND B, 2005, 772 : 85 - 86
  • [4] Photoinduced structural instability around the Si-H bond in undoped a-Si:H and related wide-gap alloys
    Oheda, H
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 338 : 361 - 364
  • [5] Light and annealing induced changes in Si-H bonds in undoped a-Si:H
    Sheng, SR
    Kong, GL
    Liao, XB
    SOLID STATE COMMUNICATIONS, 2000, 116 (09) : 519 - 524
  • [6] INFRARED VIBRATIONAL-SPECTRA OF SI-H BONDS IN A-SI
    PAUL, W
    FREEMAN, EC
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 249 - 249
  • [7] Effect of Higher-Order Silane Deposition on Spatial Profile of Si-H2/Si-H Bond Density Ratio of a-Si:H Films
    Shi, Liu
    Tanaka, Kazuma
    Hara, Hisayuki
    Nagaishi, Shota
    Yamashita, Daisuke
    Kamataki, Kunihiro
    Itagaki, Naho
    Koga, Kazunori
    Shiratani, Masaharu
    PLASMA AND FUSION RESEARCH, 2019, 14 (SpecialIssue 3) : 4406144 - 1
  • [8] Role of Si-H bonding in a-Si:H metastability
    Godet, C
    Cabarrocas, PRI
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (01) : 97 - 102
  • [10] Ultrafast infrared experiments on Si-H vibrations in a-Si:H
    Van der Voort, M
    Rella, CW
    van der Meer, AFG
    Akimov, AV
    Dijkhuis, JI
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 : 180 - 184