Difference in nature of photoinduced defects and structural instability between surroundings of Si-H and Si-H2 bonds in a-Si:H

被引:0
作者
Oheda, Hidetoshi [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
来源
Physics of Semiconductors, Pts A and B | 2007年 / 893卷
关键词
amorphous silicon; structural instability; infrared absorption;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The difference in structural instability between Surroundings of the Si-H and Si-H-2 bonds is studied by observing modulated IR absorption. The result is discussed in connection with the difference in nature of defects depending on their creation temperature.
引用
收藏
页码:129 / 130
页数:2
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