Patterning of highly conducting polyaniline films

被引:3
作者
Graham, T [1 ]
Afzali, A [1 ]
Angelopoulos, M [1 ]
Gelorme, J [1 ]
Shaw, J [1 ]
机构
[1] IBM, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
来源
EMERGING LITHOGRAPHIC TECHNOLOGIES IV | 2000年 / 3997卷
关键词
polyaniline; conducting polymers; patterning; photoresist; conductivity; RIE plasma etch; aluminum; synthesis; highly conductive; polymerization;
D O I
10.1117/12.390069
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Polyaniline is a family of soluble, electrically conducting polymers that have a potential for a number of applications. They are a unique class of electronic materials which combines the electronic properties of metals with the mechanical and physical properties, and the processing advantages of a conventional organic polymer. In this paper, we will discuss the synthesis, and formulation of a highly conductive polyaniline that has applications as electrodes or thin film wiring. However, for these and other uses it is necessary to pattern the conducting polymer lithographically. We will discuss the various ways of patterning polyaniline, either indirectly or using the conventional photoresist technology. The affects of each patterning procedure on the conductivity of the polyaniline will also be covered.
引用
收藏
页码:334 / 343
页数:10
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