A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices

被引：154
作者：
Moerman, I [1 ]
Van Daele, PP [1 ]
Demeester, PM [1 ]
机构：
[1] State Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium
来源：
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 1997年 / 3卷 / 06期
关键词：
mode-size converters; monolithic integration; optoelectronic integrated circuits; III-V semiconductors;
D O I：
10.1109/2944.658785
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers), By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEIC's in future fiber-optical networks can be much reduced, This paper gives an overview of different taper designs, the possible fabrication technologies and performances of tapered devices.
引用
收藏
页码：1308 / 1320
页数：13
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