共 50 条
- [34] Polarizing assist features for high-NA optical lithography 22ND ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY, PTS 1 AND 2, 2002, 4889 : 1313 - 1323
- [35] Advanced development methods for high-NA EUV lithography ADVANCES IN PATTERNING MATERIALS AND PROCESSES XL, 2023, 12498
- [37] High-NA EUV projection lens with central obscuration EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VII, 2016, 9776
- [38] Imaging performance of the EUV high NA anamorphic system 31ST EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2015, 9661
- [39] High-NA EUV lithography optics becomes reality EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XI, 2020, 11323
- [40] High-Performance Continuous Aspheric Microlenses Array For Shack-Hartmann Sensor 2008 IEEE PHOTONICSGLOBAL@SINGAPORE (IPGC), VOLS 1 AND 2, 2008, : 293 - 296