Strategies for fabricating atom probe specimens with a dual beam FIB

被引：207
作者：
Miller, MK
Russell, KF
Thompson, GB
机构：
[1] Oak Ridge Natl Lab, Div Met & Ceram, Oak Ridge, TN 37831 USA
[2] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA
来源：
ULTRAMICROSCOPY | 2005年 / 102卷 / 04期
关键词：
atom probe; focused ion beam; ion milling; specimen preparation;
D O I：
10.1016/J.ULTRAMIC.2004.10.011
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A FIB-based lift-out method for preparing atom probe specimens at site specific locations such as coarse precipitates, grain boundaries, interphase interfaces, denuded zones, heat affected zones, implanted, near surface and subsurface regions, shear bands, etc. has been developed. FIB-based methods for the fabrication of atom probe specimens from thin ribbons, sheet stock, and powders have been developed. Published by Elsevier B.V.
引用
收藏
页码：287 / 298
页数：12
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