Strategies for fabricating atom probe specimens with a dual beam FIB

被引：216
作者：
Miller, MK
Russell, KF
Thompson, GB
机构：
[1] Oak Ridge Natl Lab, Div Met & Ceram, Oak Ridge, TN 37831 USA
[2] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA
来源：
ULTRAMICROSCOPY | 2005年 / 102卷 / 04期
关键词：
atom probe; focused ion beam; ion milling; specimen preparation;
D O I：
10.1016/J.ULTRAMIC.2004.10.011
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A FIB-based lift-out method for preparing atom probe specimens at site specific locations such as coarse precipitates, grain boundaries, interphase interfaces, denuded zones, heat affected zones, implanted, near surface and subsurface regions, shear bands, etc. has been developed. FIB-based methods for the fabrication of atom probe specimens from thin ribbons, sheet stock, and powders have been developed. Published by Elsevier B.V.
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收藏
页码：287 / 298
页数：12
相关论文
共 34 条
[1]  
Colijn H.O., 2004, MICROSC MICROANAL S2, V10, P1150, DOI DOI 10.1017/S1431927604883193
[2]   PREPARATION OF CONTAMINATION-FREE TUNGSTEN SPECIMENS FOR FIELD-ION MICROSCOPE [J].
FASTH, JE ;
LOBERG, B ;
NORDEN, H .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1967, 44 (12) :1044-&
[3]   A review of focused ion beam milling techniques for TEM specimen preparation [J].
Giannuzzi, LA ;
Stevie, FA .
MICRON, 1999, 30 (03) :197-204
[4]   A METHOD FOR PREPARING ATOM-PROBE SPECIMENS FOR NANOSCALE COMPOSITIONAL ANALYSIS OF METALLIC THIN-FILMS [J].
HASEGAWA, N ;
HONO, K ;
OKANO, R ;
FUJIMORI, H ;
SAKURAI, T .
APPLIED SURFACE SCIENCE, 1993, 67 (1-4) :407-412
[5]   HIGH-RESOLUTION MICROANALYSIS OF BINDER PHASE IN AS SINTERED WC-CO CEMENTED CARBIDES [J].
HELLSING, M .
MATERIALS SCIENCE AND TECHNOLOGY, 1988, 4 (09) :824-829
[6]   A CONTROLLED SPECIMEN PREPARATION TECHNIQUE FOR INTERFACE STUDIES WITH ATOM-PROBE FIELD-ION MICROSCOPY [J].
HENJERED, A ;
NORDEN, H .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1983, 16 (07) :617-619
[7]   First data from a commercial local electrode atom probe (LEAP) [J].
Kelly, TE ;
Gribb, TT ;
Olson, JD ;
Martens, RL ;
Shepard, JD ;
Wiener, SA ;
Kunicki, TC ;
Ulfig, RM ;
Lenz, DR ;
Strennen, EM ;
Oltman, E ;
Bunton, JH ;
Strait, DR .
MICROSCOPY AND MICROANALYSIS, 2004, 10 (03) :373-383
[8]   Local Electrode Atom Probes [J].
Kelly, TF ;
Larson, DJ .
MATERIALS CHARACTERIZATION, 2000, 44 (1-2) :59-85
[9]   A specimen preparation technique for atom probe analysis of the near-surface region of cemented carbides [J].
Kvist, A ;
Andren, HO ;
Lundin, L .
APPLIED SURFACE SCIENCE, 1996, 94-5 :356-361
[10]  
Larson DJ, 2001, MICROSC MICROANAL, V7, P24, DOI 10.1007/s100050010058
1234