Characteristics of Mg doped TiO2 thin film based deep UV photodetector

被引：24

作者：

Dalal, Avijit ^{[1
]}

Mishra, Madhuri ^{[2
]}

Chakrabarti, Subhananda ^{[3
]}

Gupta, Rajeev Kumar ^{[4
]}

Mondal, Aniruddha ^{[1
]}

机构：

[1] Natl Inst Technol Durgapur, Dept Phys, Durgapur 713209, West Bengal, India

[2] Indian Inst Technol, Ctr Res Nano Technol & Sci, Mumbai 400076, Maharashtra, India

[3] Indian Inst Technol, Dept Elect Engn, Mumbai 400076, Maharashtra, India

[4] Univ Petr, Sch Engn, Dept Phys, Energy Studies, Dehra Dun 248007, Uttarakhand, India

来源：

VACUUM | 2022年 / 201卷

关键词：

Electron beam evaporation system; Mg doped TiO2 thin film; AFM; Modified urbach equation; Deep UV detector; RAY PHOTOELECTRON-SPECTROSCOPY; PERFORMANCE; DEPOSITION; DETECTOR; LIGHT; TAIL;

D O I：

10.1016/j.vacuum.2022.111115

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Co-doping of Mg into chemically stable TiO2 thin film is attractive for deep UV detection. In this report, we have fabricated-110 nm undoped TiO2 thin film and Mg doped TiO2 thin film based photodetectors on p-type Silicone substrates. The Mg doped TiO2 thin film shows good hydrophobicity. The undoped TiO2 thin film shows low deep UV besides high responsivity in the visible region. The Mg:TiO2 photodetector shows a maximum of four times superior light sensitivity as compared to undoped TiO2 thin film at 200 nm illumination. The Mg:TiO2 thin film shows the countable temporal response at 290 nm but the detector possesses low responsivity in the visible region.

引用

页数：9

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