FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO3

被引：11

作者：

Makkonen, T ^{[1
]}

Plessky, VP ^{[1
]}

Grigorievski, VI ^{[1
]}

Kopp, L ^{[1
]}

Solal, M ^{[1
]}

Steichen, W ^{[1
]}

Salomaa, MM ^{[1
]}

机构：

[1] Helsinki Univ Technol, Phys Mat Lab, FIN-02015 Helsinki, Finland

来源：

2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年

关键词：

D O I：

10.1109/ULTSYM.2002.1193410

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The high velocity (above 6000 m/s in LiNbO3) of the longitudinal leaky SAW (LLSAW) mode makes it attractive for use in high frequency SAW devices in the 2-3 GHz range. We have investigated, both experimentally and theoretically, the dependence of one-port LLSAW resonator performance on YZ-LiNbO3 on the metallization thickness and metallization ratio. The results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness. The observed behaviour is addressed with the help of simulations using a combined FEM-Green's function method. Based on the simulated and experimental data, the optimal aluminum thickness is found to be approximately 8%.

引用

页码：317 / 320

页数：4

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