Hydrogen nanochemistry achieving clean and pre-oxidized silicon carbide surface metallization

被引:0
|
作者
Soukiassian, P.
Silly, M. G.
Radtke, C.
Enriquez, H.
D'angelo, M.
Derycke, V.
Aristov, V. Yu.
Amy, F.
Chabal, Y. J.
Moras, P.
Pedio, M.
Gardonio, S.
Ottaviani, C.
Perfetti, P.
机构
[1] Univ Paris 06, Commissariat Energie Atom, Lab SIMA, DSM DRECAM SPCSI, F-91191 Gif Sur Yvette, France
[2] Russian Acad Sci, Chernogolovka 142432, Moscow, Russia
[3] Agere Syst, Murray Hill, NJ 07974 USA
[4] Air Prod & Chem Inc, Allentown, PA 18195 USA
[5] Rutgers State Univ, Dept Chem, Piscataway, NJ 08855 USA
[6] Elettra Sincrotrone, I-34012 Trieste, Italy
[7] CNR, ISM, I-34012 Trieste, Italy
关键词
hydrogen; metallization; clean and oxidized surfaces; cubic silicon carbide; synchrotron radiation; core level and valence band photoemission spectroscopies; scanning tunneling microscopy and spectroscopy; infrared absorption spectroscopy;
D O I
10.4028/www.scientific.net/MSF.527-529.667
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review H-induced metallization of clean and pre-oxidized 3C-SiC(100) 3x2 surfaces, the 1(st) example of a semiconductor surface metallization by H. These investigations are based on core level and valence band photoemission spectroscopies using synchrotron radiation, infrared absorption spectroscopy, and scanning tunneling microscopy and spectroscopy. These results are also compared to recent ab-initio calculations. This unexpected behavior results from an asymmetric attack of Si-dimers located below the surface creating dangling bond defects and from H atoms terminating top-surface dangling bonds leading overall to large charge transfer to the surface and sub-surface regions.
引用
收藏
页码:667 / 672
页数:6
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