Increasing the optical coupling efficiency of planar photodetectors: electron beam writing of an integrated microlens array on top of a MSM device

被引：8

作者：

Seabra, AC ^{[1
]}

Araes, FG ^{[1
]}

Romero, MA ^{[1
]}

Neto, LG ^{[1
]}

Nabet, B ^{[1
]}

机构：

[1] Univ Sao Paulo, EPUSP, Sao Paulo, Brazil

来源：

OPTICS IN COMPUTING 2000 | 2000年 / 4089卷

关键词：

optoelectronic detectors; MSM devices; optical coupling;

D O I：

10.1117/12.386781

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

in this paper we describe the fabrication of an army of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Experimental data shows an increase of about 65% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency.

引用

页码：890 / 894

页数：3

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[3]

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