Uncertainty evaluation in atomic force microscopy measurement of nanoparticles based on statistical mixed model in a Bayesian framework

被引:3
作者
Petry, J. [1 ]
Boeck, B. De [1 ]
Sebaihi, N. [1 ]
Coenegrachts, M. [1 ]
Caebergs, T. [1 ]
Dobre, M. [1 ]
机构
[1] FPS Econ, Natl Stand, 16 Blvd Roi Albert II, B-1000 Brussels, Belgium
基金
欧盟地平线“2020”;
关键词
AFM; mixed model; uncertainty calculation; Bayesian statistics; design of experiment; AFM;
D O I
10.1088/1361-6501/abe47f
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A major bottleneck in nanoparticle sizing is the lack of data comparability between techniques and between laboratories. However, this can be overcome by making the measurements traceable to the SI together with realistic uncertainty evaluation. In the present work, a novel approach is proposed to perform measurement uncertainty evaluation in a Bayesian framework by statistically modeling appropriately selected measurement data when no comprehensive physical model is available. The method is applied to the dimensional measurement of nanoparticles by atomic force microscopy (AFM) measurement and the calibration is performed by a multiple points calibration curve. Nevertheless, the proposed method can be applied to other microscopy techniques. The experimental data used to construct the statistical model are collected so that the influence of relevant measurement parameters can be assessed. An optimized experiment is designed under the intermediate precision conditions in order to limit the number of measurements to perform. Among the different influencing parameters, it is found that the AFM operator and image analyst do not significantly affect the measurement variability while the tip tapping force, the probe nature and the tip scan speed do. The particular case of gold nanoparticle of nominal diameter 30 nm is treated as an example of the method.
引用
收藏
页数:8
相关论文
共 21 条
[1]  
Betancourt, 2017, ARXIV170102434
[2]  
BIPM IEC IFCC ILAC ISO IUPAC IUPAP and OIML, 2008, Evaluation of measurement data-guide to the expression of uncertainty in measurement
[3]   Validation of dynamic light scattering and centrifugal liquid sedimentation methods for nanoparticle characterisation [J].
Braun, A. ;
Couteau, O. ;
Franks, K. ;
Kestens, V. ;
Roebben, G. ;
Lamberty, A. ;
Linsinger, T. P. J. .
ADVANCED POWDER TECHNOLOGY, 2011, 22 (06) :766-770
[4]  
Bresler A., 2019, RStan: The R interface to Stan (R package version 2.19.2)
[5]   Methodology to evaluate the uncertainty associated with nanoparticle dimensional measurements by SEM [J].
Crouzier, L. ;
Delvallee, A. ;
Allard, A. ;
Devoille, L. ;
Ducourtieux, S. ;
Feltin, N. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2019, 30 (08)
[6]   Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology [J].
Crouzier, Loic ;
Delvallee, Alexandra ;
Ducourtieux, Sebastien ;
Devoille, Laurent ;
Noircler, Guillaume ;
Ulysse, Christian ;
Tache, Olivier ;
Barruet, Elodie ;
Tromas, Christophe ;
Feltin, Nicolas .
BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2019, 10 :1523-1536
[7]   Size measurement uncertainties of near-monodisperse, near-spherical nanoparticles using transmission electron microscopy and particle-tracking analysis [J].
De Temmerman, Pieter-Jan ;
Verleysen, Eveline ;
Lammertyn, Jeroen ;
Mast, Jan .
JOURNAL OF NANOPARTICLE RESEARCH, 2014, 16 (10)
[8]   ISO 5725 and GUM: comparison and comments [J].
Deldossi, Laura ;
Zappa, Diego .
ACCREDITATION AND QUALITY ASSURANCE, 2009, 14 (03) :159-166
[9]   Toward an uncertainty budget for measuring nanoparticles by AFM [J].
Delvallee, A. ;
Feltin, N. ;
Ducourtieux, S. ;
Trabelsi, M. ;
Hochepied, J. F. .
METROLOGIA, 2016, 53 (01) :41-50
[10]  
Dietrich F., 2017, PROBABILISTIC OPINIO, V1, P787