Advanced interactive personal computer-based process control systems for oxide MOCVD systems.

被引：0

作者：

Tompa, GS ^{[1
]}

Shen, D ^{[1
]}

Zhang, C ^{[1
]}

Murzin, IH ^{[1
]}

机构：

[1] STRUCTURED MAT IND INC,PISCATAWAY,NJ 08854

来源：

METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF ELECTRONIC CERAMICS II | 1996年 / 415卷

关键词：

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：167 / 172

页数：6

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