Improved gate-control in InAs nanowire structures by the use of GdScO3 as a gate dielectric

被引:2
作者
Volk, C. [1 ,2 ]
Schubert, J. [1 ,2 ]
Weis, K. [1 ,2 ]
Hernandez, S. Estevez [1 ,2 ]
Akabori, M. [1 ,2 ]
Sladek, K. [1 ,2 ]
Hardtdegen, H. [1 ,2 ]
Schaepers, T. [1 ,2 ]
机构
[1] Forschungszentrum Julich, Inst Bio & Nanosyst IBN 1, D-52425 Julich, Germany
[2] Forschungszentrum Julich, JARA Fundamentals Future Informat Technol, D-52425 Julich, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2010年 / 100卷 / 01期
关键词
DOUBLE-QUANTUM DOTS; ELECTRON-MOBILITY; OXIDE;
D O I
10.1007/s00339-010-5804-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigated the properties of gadolinium scandate (GdScO3) as a gate dielectric for top-gate electrodes on undoped InAs nanowires. It is demonstrated that due to the high dielectric constant of GdScO3 (k=22), a better control of the conductance of the nanowire is achieved compared to a reference SiO2-isolated back-gate electrode. We analyzed the output and transfer characteristics of top-gate-controlled InAs wires at room temperature and at temperatures down to 4 K. Owing to the good coverage of the InAs nanowire by the 50-nm-thick GdScO3 layer, which was deposited by pulsed-laser deposition, the gate leakage current is sufficiently suppressed.
引用
收藏
页码:305 / 308
页数:4
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