Hole-injection-induced structural transformation of oxygen vacancy in α-quartz

被引:66
作者
Oshiyama, A [1 ]
机构
[1] Univ Tsukuba, Inst Phys, Tsukuba, Ibaraki 305, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1998年 / 37卷 / 2B期
关键词
density functional theory SiO2; oxygen vacancy; bistability; charge state; stress induced leakage current;
D O I
10.1143/JJAP.37.L232
中图分类号
O59 [应用物理学];
学科分类号
摘要
Charge-state-dependent structural stability of oxygen vacancy in alpha-quartz is determined by using first-principles total-energy calculations. It is found that neutral and positively charged oxygen vacancies show bistability, and that a spontaneous structural transformation occurs for doubly positively and doubly negatively charged states. The structural transformation induces a new electron trap, possibly causing the degradation of SiO2 thin films.
引用
收藏
页码:L232 / L234
页数:3
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