共 30 条
[3]
Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2014, 32 (01)
[5]
INFRARED-SPECTROSCOPY OF SI(111) AND SI(100) SURFACES AFTER HF TREATMENT - HYDROGEN TERMINATION AND SURFACE-MORPHOLOGY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:2104-2109
[6]
Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2013, 31 (03)