Nanofabrication on hydrogen-terminated diamond surfaces by atomic force microscope probe-induced oxidation

被引：44

作者：

Tachiki, M ^{[1
]}

Fukuda, T ^{[1
]}

Sugata, K ^{[1
]}

Seo, H ^{[1
]}

Umezawa, H ^{[1
]}

Kawarada, H ^{[1
]}

机构：

[1] Waseda Univ, Sch Sci & Engn, Shinjuku Ku, Tokyo 1690072, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 7B期

关键词：

diamond; SPM; AFM; surface conduction; hydrogen termination; electron affinity;

D O I：

10.1143/JJAP.39.4631

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Field-assisted local oxidation on a hydrogen-terminated (001) diamond surface was performed using an atomic force microscope (AFM). Anodic oxidation by a surface water meniscus layer is suggested to account for this oxidation process. Through the oxygenated al ca, Fowler-Nordheim (F-N) tunneling current was observed. The difference in electron affinity between the hydrogen-terminated surface and the oxygenated area was confirmed by scanning electron microscopic (SEM) observations.

引用

页码：4631 / 4632

页数：2

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