On the influence of short and medium range order on the material band gap in hydrogenated amorphous silicon

被引:41
作者
Mahan, AH
Biswas, R
Gedvilas, LM
Williamson, DL
Pan, BC
机构
[1] Natl Renewable Energy Lab, Golden, CO 80401 USA
[2] Iowa State Univ, Dept Phys, Ames, IA 50011 USA
[3] Iowa State Univ, Ctr Microelect Res, Ames, IA 50011 USA
[4] Colorado Sch Mines, Dept Phys, Golden, CO 80401 USA
[5] Univ Sci & Technol China, Dept Phys, Hefei 230026, Peoples R China
关键词
D O I
10.1063/1.1772876
中图分类号
O59 [应用物理学];
学科分类号
摘要
We examine different types of order measured in hydrogenated amorphous silicon (a-Si:H) and their effect on the optical absorption (band gap). We first review previous experimental work determining order on a short-range scale as probed by Raman spectroscopy, and provide, using molecular dynamics simulations, a theoretical explanation for why the band gap increases when this type of ordering is improved. We then present results on a-Si:H films deposited by hot wire chemical vapor deposition (CVD) and plasma enhanced CVD where the short-range order, from Raman spectroscopy, does not change, but order on a larger or medium-range scale does. This order is determined by measuring the width of the first x-ray diffraction peak, and was varied by depositing films at different substrate temperatures and/or different hydrogen dilutions. We find that the film band gap also increases when this type of ordering improves, and we provide a possible mechanism to explain these trends. We also suggest that much of the previous literature showing an increase in band gap with increasing film hydrogen content should be treated with caution, as these works may not have accurately deconvoluted the effects of optical adsorption due to film hydrogenation from those due to both types of lattice ordering. Finally, we argue that this same trend may apply, to a limited extent, to microcrystalline silicon. (C) 2004 American Institute of Physics.
引用
收藏
页码:3818 / 3826
页数:9
相关论文
共 42 条
[1]  
ABELSON JR, 1988, RN10690 EMIS, P273
[2]   STRUCTURAL INFORMATION FROM THE RAMAN-SPECTRUM OF AMORPHOUS-SILICON [J].
BEEMAN, D ;
TSU, R ;
THORPE, MF .
PHYSICAL REVIEW B, 1985, 32 (02) :874-878
[3]  
BERNTSEN AJM, 1993, THESIS UTRECHT U, P88
[4]  
Biswas R, 2003, MATER RES SOC SYMP P, V762, P15
[5]   Metastability of amorphous silicon from silicon network rebonding [J].
Biswas, R ;
Pan, BC ;
Ye, YY .
PHYSICAL REVIEW LETTERS, 2002, 88 (20) :4-205502
[6]  
BRAUNSTEIN R, 1999, 52026127 NRELSR, P66
[7]   DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON [J].
CODY, GD ;
TIEDJE, T ;
ABELES, B ;
BROOKS, B ;
GOLDSTEIN, Y .
PHYSICAL REVIEW LETTERS, 1981, 47 (20) :1480-1483
[8]  
COLLINS R, COMMUNICATION
[9]  
DYLLA T, UNPUB
[10]  
FEDDERS PA, 1997, MATER RES SOC S P, V467, P403