Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium-Strontium-Titanate Films

被引：13

作者：

Kuzmina, Natalia ^{[1
]}

Malkerova, Irina ^{[2
]}

Alikhanyan, Andrey ^{[2
]}

Tsymbarenko, Dmitry ^{[1
]}

Lyssenko, Konstantin ^{[3
]}

Kreinin, Oleg ^{[4
]}

Shuster, Gregory ^{[4
]}

Lakin, Evgeny ^{[4
]}

Zolotoyabko, Emil ^{[4
]}

机构：

[1] Moscow MV Lomonosov State Univ, Dept Chem, Moscow 119991, Russia

[2] NS Kurnakov Gen & Inorgan Chem Inst, Moscow 119991, Russia

[3] AN Nesmeyanov Organoelement Cpds Inst, Moscow 119991, Russia

[4] Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel

来源：

CHEMICAL VAPOR DEPOSITION | 2009年 / 15卷 / 10-12期

关键词：

beta-diketonates; Barium-strontium titanate; Epitaxial films; MOCVD; Volatile precursors; CHEMICAL-VAPOR-DEPOSITION; BATIO3; THIN-FILMS; X-RAY CRYSTAL; DIELECTRIC-CONSTANT; POLYETHER ADDUCTS; VOLATILE; MGO; FABRICATION; CAPACITORS; COMPLEXES;

D O I：

10.1002/cvde.200906786

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Novel barium and strontium precursors, belonging to the family of volatile complexes of the alkaline earth element (AEE) fluorinated beta-diketonates with polyglymes, [M(dfhd)(2)(tetraglyme)] [Hdfnd = 1,1,1,2,2,6,6,7,7,7-dekafluro-heptane-3,5-dione, M = Ba (I), Sr (II)], are synthesized and tested with an aim to use them for metal-organic (MO)CVD of BaxSr1-xTiO3 (BST) thin films. The thermal behavior and composition of vapor phases for compounds I and 11 are studied by thermal analysis and mass spectrometry (MS). Considerable reduction of the melting point (down to 80-90 degrees C) for both compounds I and II, as compared to known volatile complexes, is achieved. By means of the developed precursors, epitaxial BST films (x = 0.5) are grown on SrTiO3 substrates by using the modified MOCVD facility. The quality of the grown films is examined by high-resolution (HR) X-ray diffraction (XRD) and high-resolution (HR) scanning electron microscopy (SEM).

引用

页码：342 / 349

页数：8

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