Low-loss 2-bit tunable bandpass filters using MEMS DC contact switches

被引：106

作者：

Pothier, A ^{[1
]}

Orlianges, JC

Zheng, GZ

Champeaux, C

Catherinot, A

Cros, D

Blondy, P

Papapolymerou, J

机构：

[1] Res Inst Opt & Microwave Commun, F-87060 Limoges, France

[2] Univ Limoges, Dept Mat Sci & Proc, F-87060 Limoges, France

[3] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2005年 / 53卷 / 01期

关键词：

RF microelectromechanical system (MEMS); tunable filters; tunable resonator;

D O I：

10.1109/TMTT.2004.839935

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the development of tunable filters using ohmic contact microelectromechanical system switches. It is shown that this type of switch is very well suited for the fabrication of low-loss high tuning-range microwave filters. Two sets of tunable Ku-band microstrip filters and resonators have been fabricated, with measured tuning ranges of 20% and 44%, and unloaded quality factors better than 75 in all cases. The 2-bit 5.7% fractional bandwidth, tunable bandpass filters exhibit insertion losses lower than 3.2 dB in all states.

引用

页码：354 / 360

页数：7