Low-loss 2-bit tunable bandpass filters using MEMS DC contact switches

被引：106
作者：
Pothier, A [1 ]
Orlianges, JC
Zheng, GZ
Champeaux, C
Catherinot, A
Cros, D
Blondy, P
Papapolymerou, J
机构：
[1] Res Inst Opt & Microwave Commun, F-87060 Limoges, France
[2] Univ Limoges, Dept Mat Sci & Proc, F-87060 Limoges, France
[3] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2005年 / 53卷 / 01期
关键词：
RF microelectromechanical system (MEMS); tunable filters; tunable resonator;
D O I：
10.1109/TMTT.2004.839935
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the development of tunable filters using ohmic contact microelectromechanical system switches. It is shown that this type of switch is very well suited for the fabrication of low-loss high tuning-range microwave filters. Two sets of tunable Ku-band microstrip filters and resonators have been fabricated, with measured tuning ranges of 20% and 44%, and unloaded quality factors better than 75 in all cases. The 2-bit 5.7% fractional bandwidth, tunable bandpass filters exhibit insertion losses lower than 3.2 dB in all states.
引用
收藏
页码：354 / 360
页数：7
相关论文
共 21 条
  • [1] Miniature and tunable filters using MEMS capacitors
    Abbaspour-Tamijani, A
    Dussopt, L
    Rebeiz, GM
    [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2003, 51 (07) : 1878 - 1885
  • [2] Variable MEMS capacitors implemented into RF filter systems
    Borwick, RL
    Stupar, PA
    DeNatale, JF
    Anderson, R
    Erlandson, R
    [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2003, 51 (01) : 315 - 319
  • [3] RF MEMS-based tunable filters
    Brank, J
    Yao, ZMJ
    Eberly, M
    Malczewski, A
    Varian, K
    Goldsmith, CL
    [J]. INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2001, 11 (05) : 276 - 284
  • [4] MEMS microswitches for reconfigurable microwave circuitry
    Duffy, S
    Bozler, C
    Rabe, S
    Knecht, J
    Travis, L
    Wyatt, P
    Keast, C
    Gouker, M
    [J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2001, 11 (03) : 106 - 108
  • [5] Fourn E, 2003, IEEE MTT-S, P523, DOI 10.1109/MWSYM.2003.1210991
  • [6] MEMS switchable interdigital coplanar filter
    Fourn, E
    Pothier, A
    Champeaux, C
    Tristant, P
    Catherinot, A
    Blondy, P
    Tanné, G
    Rius, E
    Person, C
    Huret, F
    [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2003, 51 (01) : 320 - 324
  • [7] Low-loss and compact V-band MEMS-based analog tunable bandpass filters
    Kim, HT
    Park, JH
    Kim, YK
    Kwon, Y
    [J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2002, 12 (11) : 432 - 434
  • [8] Lakshminarayanan B, 2003, IEEE MTT-S, P1789, DOI 10.1109/MWSYM.2003.1210487
  • [9] A compact low-loss reconfigurable monolithic low-pass filter using multiple-contact MEMS switches
    Lee, S
    Park, JH
    Kim, JM
    Kim, HT
    Kim, YK
    Kwon, Y
    [J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2004, 14 (01) : 37 - 39
  • [10] Distributed MEMS transmission lines for tunable filter applications
    Liu, Y
    Borgioli, A
    Nagra, AD
    York, RA
    [J]. INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2001, 11 (05) : 254 - 260
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