Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

被引：3
作者：
Kaya, Onurcan [1 ]
Kose, Talha [1 ,2 ]
Azgin, Kivanc [1 ,2 ,3 ]
机构：
[1] METU, Dept Mech Engn, Ankara, Turkey
[2] Middle E Tech Univ, METU MEMS Ctr, Ankara, Turkey
[3] METU, Grad Sch Nat & Appl Sci, Micro & Nanotechnol Program, Ankara, Turkey
来源：
2019 6TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2019) | 2019年
关键词：
Temperature Compensation; DETF; MEMS Resonator; Time Base;
D O I：
10.1109/isiss.2019.8739559
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.
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页数：2
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