On the temperature stability of integrated MIS low-pass filter structures

被引：2
|
作者：
Kuehn, M. [1 ]
Aeron, Mi. [1 ]
Florange, R. [1 ]
Kliem, H. [1 ]
机构：
[1] Univ Saarland, Inst Elect Engn Phys, D-66041 Saarbrucken, Germany
来源：
SOLID-STATE ELECTRONICS | 2007年 / 51卷 / 06期
关键词：
low-pass filter; integrated; passive; granular; disordered; metal thin film; temperature stability; pd; palladium; hydrogen;
D O I：
10.1016/j.sse.2007.03.015
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Integrated analogue MIS low-pass filters are considered. They consist mainly of a thin metal film representing a distributed resistance R on a dielectric representing a distributed capacitance C. A major criterion with respect to their technical application is the temperature stability. Assuming that the capacitance does not change with varying temperature the crucial point to meet the requirements of reliability is the resistivity of the metal film. In order to improve the temperature stability we applied an annealing process for filter structures with Pd as the metal film. The results show that the temperature stability can be improved by a temperature conditioning process. (c) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码：931 / 935
页数：5
相关论文
共 50 条
  • [21] CONSTANT RESISTANCE LOW-PASS FILTER
    CHANG, CY
    PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (07): : 983 - &
  • [22] MODERN LOW-PASS FILTER CHARACTERISTICS
    EGGEN, CP
    MCALLIST.AS
    ELECTRO-TECHNOLOGY, 1966, 78 (02): : 50 - &
  • [23] MULTIMODE WAVEGUIDE - LOW-PASS FILTER
    STEINER, KH
    TREHEUX, M
    BOUILLIE, R
    APPLIED OPTICS, 1973, 12 (11): : 2732 - 2735
  • [24] SCALED SHIELD LOW-PASS FILTER
    STIRRAT, WA
    IEEE TRANSACTIONS ON ELECTROMAGNETIC COMPATIBILITY, 1968, EM10 (02) : 233 - &
  • [25] Grating optical low-pass filter
    Fujisawa, K
    Uetsuki, M
    Nashida, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (03): : 1768 - 1776
  • [26] A Subhertz Nanopower Low-Pass Filter
    Rodriguez-Villegas, Esther
    Casson, Alexander J.
    Corbishley, Phil
    IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS, 2011, 58 (06) : 351 - 355
  • [27] Optimized design of a low-pass filter using defected ground structures
    Guan, Xuehui
    Li, Guohui
    Ma, Zhewang
    2005 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS, VOLS 1-5, 2005, : 481 - 484
  • [28] Analysis of Synchronization Stability of the Normalization PLL Based on Low-pass Filter
    Lü Y.
    Zou Z.
    Wu C.
    Li H.
    She Y.
    Wang Y.
    Gaodianya Jishu/High Voltage Engineering, 2022, 48 (10): : 3848 - 3858
  • [29] MODIFIED ULTRASPHERICAL LOW-PASS FILTER
    ATTIKIOUZEL, J
    PHUC, DT
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1978, 44 (06) : 667 - 671
  • [30] THE LAVERNE TERRACE LOW-PASS FILTER
    POWELL, L
    JOURNAL OF THE AUDIO ENGINEERING SOCIETY, 1982, 30 (11): : 815 - 827
12345