Numerical investigation of heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth - Part 1: non-rotating seed

被引:19
作者
Tavakoli, M. H. [1 ]
Wilke, H.
机构
[1] Bu Ali Sina Univ, Dept Phys, Hamadan 65174, Iran
[2] Inst Crystal Growth IKZ, D-12489 Berlin, Germany
关键词
numerical modeling; heat transfer; fluid flow; Czochralski method;
D O I
10.1002/crat.200610862
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
For the seeding process of oxide Czochralski crystal growth, the flow and temperature field of the system as well as the seed-melt interface shape have been studied numerically using the finite element method. The configuration usually used initially in a real Czochralski crystal growth process consists of a crucible, active afterheater, induction coil with two parts, insulation, melt, gas and non-rotating seed crystal. At first the volumetric distribution of heat inside the metal crucible and afterheater inducted by the RF coil was calculated. Using this heat source the fluid flow and temperature field were determined in the whole system. We have considered two cases with respect to the seed position: (1) before and (2) after seed touch with the melt. It was observed that in the case of no seed rotation (omega(seed) = 0), the flow pattern in the bulk melt consists of a single circulation of a slow moving fluid. In the gas domain, there are different types of flow motion related to different positions of the seed crystal. In the case of touched seed, the seed-melt interface has a deep conic shape towards the melt. It was shown that an active afterheater and its location with respect to the crucible, influences markedly the temperature and flow field of the gas phase in the system and partly in the melt. (C) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:544 / 557
页数:14
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