Kelvin test structure for measuring contact resistance of shallow junctions

被引：0

作者：

Nanver, LK ^{[1
]}

Goudena, EJG ^{[1
]}

Slabbekoorn, J ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DIMES IC PROC RES SECTOR,NL-2600 GB DELFT,NETHERLANDS

来源：

ICMTS 1996 - 1996 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS | 1996年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：241 / 245

页数：5

共 50 条

[41] IMPROVED PROBE APPARATUS FOR MEASURING CONTACT RESISTANCE
CHAIKIN, SW
ANDERSON, JR
SANTOS, GJ
REVIEW OF SCIENTIFIC INSTRUMENTS, 1961, 32 (12) : 1294 - &
[42] METHOD OF MEASURING CONTACT RESISTANCE OF ELECTROLYTIC COATINGS
OZEROV, MA
FOMICHEV, VT
ANTONOV, GA
ZYBIN, VA
KUTYGIN, EN
PROTECTION OF METALS, 1982, 18 (01): : 117 - 119
[43] Instrument for measuring the contact resistance of thermoelectric materials
Gorodetskii, S.M.
Drabkin, I.A.
Nel'son, I.V.
Industrial Laboratory (USSR) (English translation of Zavodskaya Laboratoriya), 1991, 56 (07):
[44] Test for measuring cut resistance of yarns
Shin, HS
Erlich, DC
Shockey, DA
JOURNAL OF MATERIALS SCIENCE, 2003, 38 (17) : 3603 - 3610
[45] TEST SECTION FOR MEASURING KAPITZA RESISTANCE
GOODLING, JS
CRYOGENICS, 1971, 11 (03) : 233 - &
[46] An evaluation of test and physical uncertainty of measuring vibration in wooden junctions
Dickow, K. A.
Kirkegaard, P. H.
Andersen, L. V.
PROCEEDINGS OF INTERNATIONAL CONFERENCE ON NOISE AND VIBRATION ENGINEERING (ISMA2012) / INTERNATIONAL CONFERENCE ON UNCERTAINTY IN STRUCTURAL DYNAMICS (USD2012), 2012, : 4985 - 4998
[47] CORRECTION OF SPREADING RESISTANCE DATA OBTAINED FROM BEVELLED SHALLOW JUNCTIONS
ABBASI, SA
BRUNNSCHWEILER, A
ELECTRONICS LETTERS, 1980, 16 (13) : 507 - 508
[48] Test for measuring cut resistance of yarns
Hyung-Seop Shin
D. C. Erlich
D. A. Shockey
Journal of Materials Science, 2003, 38 : 3603 - 3610
[49] MEASURING THE CONTACT RESISTANCE OF CIRCUIT PACK CONNECTORS
KLEINEDLER, GE
WESTERN ELECTRIC ENGINEER, 1983, 27 (02): : 10 - 15
[50] THE EFFECT OF SHEET RESISTANCE MODIFICATIONS UNDERNEATH THE CONTACT ON THE EXTRACTION OF THE CONTACT RESISTIVITY - APPLICATION TO THE CROSS KELVIN RESISTOR
SCORZONI, A
FINETTI, M
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (03) : 386 - 388

← 1 2 3 4 5 →