Surface functionalization by fine ultraviolet-patterning of nanometer-thick liquid lubricant films

被引:0
|
作者
Lu, Renguo [1 ]
Zhang, Hedong [1 ]
Komada, Suguru [2 ]
Mitsuya, Yasunaga [3 ]
Fukuzawa, Kenji [2 ]
Itoh, Shintaro [2 ]
机构
[1] Nagoya Univ, Grad Sch Informat Sci, Dept Complex Syst Sci, Chikusa Ku, Nagoya, Aichi 4648601, Japan
[2] Nagoya Univ, Grad Sch Engn, Dept Micronano Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[3] Nagoya Ind Sci Res Inst, Chikusa Ku, Nagoya, Aichi 4640819, Japan
关键词
Surface functionalization; Patterning; Nanometer-thick liquid film; Wettability; Friction; Depletion; FRICTION; MEMS/NEMS; ADHESION; MEMS; ENERGY;
D O I
10.1016/j.apsusc.2014.09.083
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
For micro/nanoscale devices, surface functionalization is essential to achieve function and performance superior to those that originate from the inherent bulk material properties. As a method of surface functionalization, we dip-coated nanometer-thick liquid lubricant films onto solid surfaces and then patterned the lubricant films with ultraviolet (UV) irradiation through a photomask. Surface topography, adhesion, and friction measurements demonstrated that the patterned films feature a concave-convex thickness distribution with thicker lubricant in the irradiated regions and a functional distribution with lower adhesion and friction in the irradiated convex regions. The pattern linewidth ranged from 100 to as fine as 0.5 pm. The surface functionalization effect of UV-patterning was investigated by measuring the water contact angles, surface energies, friction forces, and depletion of the patterned, as-dipped, and full UVirradiated lubricant films. The full UV-irradiated lubricant film was hydrophobic with a water contact angle of 102.1, and had lower surface energy, friction, and depletion than the as-dipped film, which was hydrophilic with a water contact angle of 80.7. This demonstrates that UV irradiation substantially improves the surface and tribological properties of the nanometer-thick liquid lubricant films. The UV-patterned lubricant films exhibited superior surface and tribological properties than the as-dipped film. The water contact angle increased and the surface energy, friction, and depletion decreased as the pattern linewidth decreased. In particular, the 0.5-pm patterned lubricant film even showed a larger water contact angle and lower friction and depletion than the full UV-irradiated film. These indicate that UV-patterning of nanometer-thick lubricant films with a minimized linewidth has a better surface functionalization effect than full UV irradiation. Enhancement of the surface functionalization effect may be attributed to a transition in the contact state, which was indicated by the different instantaneous friction behavior of the 0.5-pm patterned lubricant film. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:102 / 111
页数:10
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