Sub-micrometer pyroelectric tomography of AlScN films

被引：2
|
作者：
Tappertzhofen, S. [1 ]
Bette, S. [2 ]
Sievers, F. [1 ]
Fichtner, S. [3 ,4 ]
Broeker, S. [3 ]
Schmitz-Kempen, T. [2 ]
机构：
[1] TU Dortmund Univ, Dept Elect Engn & Informat Technol, Chair Micro & Nanoelect, Emil Figge Str 68, D-44227 Dortmund, Germany
[2] AixACCT Syst GmbH, Talbotstr 25, D-52068 Aachen, Germany
[3] Univ Kiel, Tech Fac, Mat & Proc Nanosyst Technol, Kaiserstr 2, D-24143 Kiel, Germany
[4] Fraunhofer Inst Silicon Technol, Fraunhoferstr 1, D-25524 Itzehoe, Germany
来源：
APPLIED PHYSICS LETTERS | 2021年 / 118卷 / 24期
关键词：
INTENSITY-MODULATION METHOD; THERMAL-CONDUCTIVITY; METHOD LIMM; DISTRIBUTIONS; NITRIDE;
D O I：
10.1063/5.0047002
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on one- to three-dimensional characterization of the pyroelectric properties of aluminum scandium nitride. By means of the laser intensity modulation method, we reconstructed the in-depth distribution of the spontaneous polarization with sub-micrometer resolution. The reconstructed profiles of the spontaneous polarization indicate that the thermal diffusivity and its temperature-dependence differ significantly from what is reported for pure aluminum nitride, which we attribute to the dominant role of phonon-alloy scattering for the heat transfer.
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页数：5
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