Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

被引：20
作者：
Beyeler, F. [1 ]
Bell, D. J. [1 ]
Nelson, B. J. [1 ]
Sun, Y. [2 ]
Neild, A. [3 ]
Oberti, S. [3 ]
Dual, J. [3 ]
机构：
[1] Swiss Fed Inst Technol, Inst Robot & Intelligent Syst, CH-8092 Zurich, Switzerland
[2] Univ Toronto, Adv Micro & Nanosyst Lab, Toronto, ON M5S 3G8, Canada
[3] Swiss Fed Inst Technol, Ctr Mech, CH-8092 Zurich, Switzerland
来源：
2006 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-12 | 2006年
关键词：
microgripper; force feedback; ultrasonic positioning; Hela cells;
D O I：
10.1109/IROS.2006.282628
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.
引用
收藏
页码：772 / +
页数：2
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