Research of Material Transfer Software Platform in IC Equipment Controlling System

被引：0
|
作者：
Wang, Yanan [1 ]
Liu, Mingzhe [1 ]
Liu, Yuanfeng [1 ]
机构：
[1] Chinese Acad Sci, Shenyang Inst Automat, Shenyang 110016, Peoples R China
来源：
PROCEEDINGS OF 2013 IEEE 4TH INTERNATIONAL CONFERENCE ON SOFTWARE ENGINEERING AND SERVICE SCIENCE (ICSESS) | 2012年
关键词：
semiconductor equipment control system; material transfer; versatility; rapid development;
D O I：
暂无
中图分类号：
TP31 [计算机软件];
学科分类号：
081202 ; 0835 ;
摘要：
This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve user's development efficiency, and has good application prospects.
引用
收藏
页码：239 / 242
页数：4
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