Morphology study of femtosecond laser nano-structured borosilicate glass using atomic force microscopy and scanning electron microscopy

被引：9

作者：

Delobelle, Benoit ^{[1
,2
]}

Courvoisier, Francois ^{[2
]}

Delobelle, Patrick ^{[1
]}

机构：

[1] Univ Franche Comte, Dept DMA, FEMTO, ST,CNRS,UMR 6174, F-25000 Besancon, France

[2] Univ Franche Comte, Dept LOPMD, FEMTO, ST,CNRS,UMR 6174, F-25030 Besancon, France

来源：

OPTICS AND LASERS IN ENGINEERING | 2010年 / 48卷 / 05期

关键词：

Nano-structuration; Femtosecond laser; Numerical aperture; Ablation threshold; Fused silica; Self-focusing; FUSED-SILICA; TRANSPARENT MATERIALS; ABLATION; DIELECTRICS; PULSES; METALS; POLARIZATION; MECHANISMS; DYNAMICS; DAMAGE;

D O I：

10.1016/j.optlaseng.2009.09.013

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The morphology of nano-craters drilled in borosilicate glass by single-shot femtosecond laser ablation has been studied by atomic force microscopy and scanning electron microscopy. The influence of polarization, numerical aperture (NA = 0.4 and 0.8) and fluence (3 < F < 18 J cm(-2)) was systematically investigated in the case of a strong geometrical confinement, leading to nanometric scale in all spatial dimensions. Indeed, the structure size is not restricted by the diffraction limit but determined by the laser pulse stability and the material properties. The dimensions of the principal and of the secondary (self-focusing) craters, and of the rim have been studied in detail. Different relationships have been proposed for the evolutions of the depths and of the different diameters of the craters as functions of the position of the specimen surface through the beam-material interaction region, and of the characteristics of the laser. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：616 / 625

页数：10

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