Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings

Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to the application of the DWF are found depending on whether the roughness is normally distributed or not. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement